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巴黎高科分层和薄膜物理试验室
来源: 时间:2013-10-12 16:54:17作者: 点击数:
  

  LABORATORY OF PHYSICS OF INTERFACES AND THIN FILMS

  Main Research Activities

  Silicon based thin films and nanomaterials

  Large area electronic applications

  Carbone nanotubes and applications

  Polarimetric instrumentation and applications

  Overview

  Staff : 56 persons including 26 permanents, 8 teachers at Ecole Polytechnique, 15 PhD and 3 Master students

  Occupied area (inside Ecole polytechnique campus) : about 1000 m2

  Budget : about 2 M€ per year (including salaries) including 0.5 M of grants and industrial contracts

  Know-How

  Plasma synthesis of semiconductor thin films, amorphous, polymorphous or microcrystalline

  silicon alloys dielectric films

  monitoring and real time control of thin film growth by spectroellipsometry

  cluster-surface interaction

  Molecular dynamics simulations

  Thin film photovoltaic devices

  Thin film transistors for large area electronic applications

  Carbon thin films and nanotubes synthesis

  Development of spectroscopic ellipsometers and polarimeters

  Applications of polarimetry

  Methods and facilities

  Plasma Enhanced Chemical Vapor Deposition (PECVD) based on radiofrequency discharges

  PECVD using Distributed Electron Cyclotron Resonance

  Hot Wire CVD

  In situ spectroellipsometry analysis of PECVD

  Spectroellipsometry from deep UV to infrared

  Raman spectroscopy

  Time Resolved Microwave Conductivity

  Surface science instrumental set-up

  Application area

  Plasma processes

  Solar cells

  Large area electronic applications (AMLCD, OLED)

  Photodetection

  Thin film coatings

  Instrumentation in optics

  Optical metrology in microelectronics

  Biomedical applications of polarimetry

Link:

www.lpicm.polytechnique.fr/jsp/accueil.jsp

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